000 00310nam a2200145Ia 4500
100 _aRai-Choudhury/R
942 _cBK
366 _f17.5
654 _amems
245 _aMEMS and MOEMS technology and application
260 _bprentice hall
_c2009
082 _a3
_bRAI
300 _a520
546 _aENGLISH
999 _c34673
_d34673