| 000 | 00392nam a2200169Ia 4500 | ||
|---|---|---|---|
| 100 | _aMadou/Marc J | ||
| 650 | _amicrofabrication | ||
| 250 | _a2 | ||
| 942 | _cRB | ||
| 366 | _f25 | ||
| 245 | _aFundamentals of microfabrication: The science of miniaturization | ||
| 260 |
_bCRC Press _c2001 |
||
| 082 |
_a621.38152 _bMAD |
||
| 300 | _a723 | ||
| 546 |
_aENGLISH _cPAMPHALETS |
||
| 999 |
_c34210 _d34210 |
||