000 00421nam a2200169Ia 4500
100 _aCampbell/Stephen A
650 _aMicroElectronics
250 _a2
942 _cBK
366 _f25
654 _amicroelectronic
245 _aThe science and engineering of Microelectronic Fabrication
260 _bOxford university press
_c2001
082 _a621.38152
_bCAM
300 _a603
546 _aENGLISH
_cPAMPHALETS
999 _c33634
_d33634