000 00378nam a2200169Ia 4500
100 _agandhi/Sorab K
650 _aVLSI
250 _a2
942 _cBK
366 _f27
654 _afabrication
245 _aVLSI fabrication principles:silicon and gallium arsenide
260 _bWiley
_c1994
082 _a621.395
_bGAN
300 _a834
546 _aENGLISH
_cPAMPHALETS
999 _c31128
_d31128