| 000 | 00346nam a2200145Ia 4500 | ||
|---|---|---|---|
| 100 | _aHelbert/John N | ||
| 942 | _cRB | ||
| 366 | _f15 | ||
| 654 | _ahandbook | ||
| 245 | _aHandbook of VLSI Microlithography:Principles | ||
| 260 |
_bJaico Publishing House _aMumbai _c2005 |
||
| 082 |
_a621.381 531/HEL _bHEL |
||
| 300 | _a1001 | ||
| 546 | _aENGLISH | ||
| 999 |
_c30215 _d30215 |
||