000
00267nam a2200133Ia 4500
100
_a
Gardner
650
_a
MEMS
942
_c
BK
366
_f
20
245
_a
Microsensor MEMS and smart devices.
260
_b
Wiley
546
_a
ENGLISH
_c
PAMPHALETS
999
_c
27177
_d
27177