000 00267nam a2200133Ia 4500
100 _aGardner
650 _aMEMS
942 _cBK
366 _f20
245 _aMicrosensor MEMS and smart devices.
260 _bWiley
546 _aENGLISH
_cPAMPHALETS
999 _c27177
_d27177