| 000 | 00407nam a2200169Ia 4500 | ||
|---|---|---|---|
| 100 | _aMaluf/Nadim/ Williams/Kirt | ||
| 650 | _aMEMS | ||
| 250 | _a2 | ||
| 942 | _cRB | ||
| 366 | _f25 | ||
| 654 | _aMICROELECTROMECHANICAL | ||
| 245 | _aIntroduction to microelectromechanical systems engineering(MEMS) | ||
| 260 |
_bArtech house _c2004 |
||
| 082 | _bMAL | ||
| 300 | _a281 | ||
| 546 |
_aENGLISH _cPAMPHALETS |
||
| 999 |
_c26103 _d26103 |
||