000 00334nam a2200157Ia 4500
100 _aJones/Thomas B
650 _aMEMS
942 _cBK
366 _f25
654 _aelectromechanics
245 _aElectromechanics and MEMS
260 _bCambridge University Press
_c2013
082 _bJON
300 _a559
546 _aENGLISH
999 _c21975
_d21975