| 000 | 00393nam a2200157Ia 4500 | ||
|---|---|---|---|
| 100 | _aCampbell/Stephen A | ||
| 650 | _aMicro electronics | ||
| 942 | _cBK | ||
| 366 | _f25 | ||
| 245 | _aThe science and engineering of Micro electronics fabrication | ||
| 260 |
_bOxford Universities Press _c2007 |
||
| 082 |
_a621.38152 _bCAM |
||
| 300 | _a603 | ||
| 546 |
_aENGLISH _cPAMPHALETS |
||
| 999 |
_c20398 _d20398 |
||