000 00445nam a2200181Ia 4500
100 _aCampbell/Stephen A
650 _aMicro electronics
250 _a2
942 _cBK
366 _f25
654 _apattern recognition
245 _aThe science and engineering of Micro electronic fabrication
260 _bOxford Universities Press
_c2007
082 _a621.38152
_bCAM
300 _a603
546 _aENGLISH
_cComputers
999 _c20382
_d20382