000 00366nam a2200157Ia 4500
100 _amay/Gary S/ Sze/Simon M
650 _aSemiconductor fabrication
942 _cBK
366 _f27
245 _aFundamentals of semiconductor fabrication
260 _bWiley
_c2004
082 _a621.3817
_bMAY
300 _a305
546 _aENGLISH
_cPAMPHALETS
999 _c18744
_d18744