| 000 | 00366nam a2200157Ia 4500 | ||
|---|---|---|---|
| 100 | _amay/Gary S/ Sze/Simon M | ||
| 650 | _aSemiconductor fabrication | ||
| 942 | _cBK | ||
| 366 | _f27 | ||
| 245 | _aFundamentals of semiconductor fabrication | ||
| 260 |
_bWiley _c2004 |
||
| 082 |
_a621.3817 _bMAY |
||
| 300 | _a305 | ||
| 546 |
_aENGLISH _cPAMPHALETS |
||
| 999 |
_c18744 _d18744 |
||