00481nam a2200157Ia 4500100002100000942000700021366000900028654000900037245004600046260002400092082001100116300000800127546001200135999001700147952015900164  aRai-Choudhury/R   cBK  f17.5  amems  aMEMS and MOEMS technology and application  bprentice hallc2009  a3bRAI  a520  aENGLISH  c34673d34673  001040708CRCaCRCEbCRCEd2023-03-17eEducational books and periodicalsg433.13i273 dt 01/06/2009l0o3 RAIp19709r2023-03-17v525.00w0000-00-00yBK