Rai-Choudhury/R  <br/><br/>
MEMS and MOEMS technology and application 

 -  prentice hall  2009 
 - 520 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>mems
<br/><br/><label>Dewey Class. No.: </label>3  / RAI