00540nam a2200169Ia 4500100001800000650002100018250000600039942000700045366000700052245006900059260002000128082001900148300000800167546002400175999001700199952015400216  aMadou/Marc J   amicrofabrication  a2  cRB  f25  aFundamentals of microfabrication: The science of miniaturization  bCRC Pressc2001  a621.38152bMAD  a723  aENGLISHcPAMPHALETS  c34210d34210  001040708CRCaCRCEbCRCEd2023-03-17eAllied Publishersg1196.25i1052 dt 06.11.2015l0o621.38152 MADp23876r2023-03-17v1595.00w0000-00-00yRB