Madou/Marc J  <br/><br/>
Fundamentals of microfabrication: The science of miniaturization 

 - 2 
 -  CRC Press  2001 
 - 723 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Topical Terms: </label><br/>microfabrication
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAD