Campbell/Stephen A  <br/><br/>
The science and engineering of Microelectronic Fabrication 

 - 2 
 -  Oxford  university press  2001 
 - 603 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MicroElectronics
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>microelectronic
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM