Helbert/John N  <br/><br/>
Handbook of VLSI Microlithography:Principles 

 - Mumbai  Jaico Publishing House  2005 
 - 1001 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>handbook
<br/><br/><label>Dewey Class. No.: </label>621.381 531/HEL  / HEL