Maluf/Nadim/ Williams/Kirt  <br/><br/>
Introduction to microelectromechanical systems engineering(MEMS) 

 - 2 
 -  Artech house  2004 
 - 281 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>MICROELECTROMECHANICAL
<br/><br/><label>Dewey Class. No.: </label> / MAL