Bao/Minhang  <br/><br/>
Analysis and design principles of MEMS Device 

 -  Elsevier  2005 
 - 312 
<br/><br/><br/>ENGLISH 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>Design
<br/><br/><label>Dewey Class. No.: </label>621.381  / BAO