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Introduction to microelectromechanical systems engineering(MEMS)

Maluf/Nadim/ Williams/Kirt

Introduction to microelectromechanical systems engineering(MEMS) - 2 - Artech house 2004 - 281

ENGLISH

Subjects--Topical Terms:
MEMS

Subjects--Facted Index Terms:
MICROELECTROMECHANICAL

Dewey Class. No.: / MAL

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Fr. Conceicao Rodrigues College of Engineering

Introduction to microelectromechanical systems engineering(MEMS)