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Analysis and design principles of MEMS Device

Bao/Minhang

Analysis and design principles of MEMS Device - Elsevier 2005 - 312

ENGLISH

Subjects--Topical Terms:
MEMS

Subjects--Facted Index Terms:
Design

Dewey Class. No.: 621.381 / BAO

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Fr. Conceicao Rodrigues College of Engineering

Analysis and design principles of MEMS Device